Title :
The influence of electrodes on the reliability to PZT thin film
Author :
Lee, Byoung-Soo ; Kim, Seung-Hyun ; Yuk, Jae-Ho ; Lee, Bok-Hee ; Shin, Paik-Kyun ; Lee, Duck-Chool
Author_Institution :
Res. Center for Next-Generation High Voltage & Power Technol., Inha Univ., Inchon, South Korea
Abstract :
The effect of the Pt electrode and the Pt-IrO2 hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a Pt-IrO2 hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized Pt-IrO2 hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.
Keywords :
dielectric hysteresis; ferroelectric capacitors; ferroelectric ceramics; ferroelectric thin films; lead compounds; leakage currents; oxidation; reliability; PZT; PZT thin film; PbZrO3TiO3; Pt; Pt electrode; Pt thin films; Pt-IrO2; Pt-IrO2 hybrid electrode; Pt-TiN-Si; Pt/TiN/poly-Si plug; TiN diffusion barrier layer; fatigue; ferroelectric device; leakage current; noncolumnar structure; oxidation; reliability; stacked structure; Capacitors; Electrodes; Fatigue; Ferroelectric films; Ferroelectric materials; Leakage current; Microstructure; Oxidation; Tin; Transistors;
Conference_Titel :
Properties and Applications of Dielectric Materials, 2003. Proceedings of the 7th International Conference on
Print_ISBN :
0-7803-7725-7
DOI :
10.1109/ICPADM.2003.1218536
