Title :
A positive exploitation of ESD events: Micro-welding induction on ohmic MEMS contacts
Author :
Tazzoli, Augusto ; Iannacci, Jacopo ; Meneghesso, Gaudenzio
Author_Institution :
Dept. of Inf. Eng., Univ. of Padova, Padova, Italy
Abstract :
The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.
Keywords :
electrostatic discharge; life testing; micromachining; microswitches; ohmic contacts; welding; ESD positive exploitation; accelerated testing; electrostatically actuated micromachined switch; heat-based active restoring mechanism; microwelding formation; microwelding induction; ohmic MEMS contact; ohmic RF-MEMS switch; Actuators; Contacts; Electrostatic discharge; Microswitches; Optical switches; Springs;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd
Conference_Location :
Anaheim, CA
Electronic_ISBN :
Pending
