DocumentCode :
1824334
Title :
Section I: Semiconductor physics and technology [breaker page]
fYear :
2013
fDate :
1-5 July 2013
Firstpage :
1
Lastpage :
1
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists on
Conference_Location :
Novosibirsk, Russia
ISSN :
2325-4173
Print_ISBN :
978-1-4799-0761-8
Type :
conf
DOI :
10.1109/EDM.2013.6641924
Filename :
6641924
Link To Document :
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