Title :
A current density analysis tool to identify BEOL fails under ESD stress
Author :
Mitra, Souvick ; Palmer, Nicholas ; Gauthier, Robert ; Muhammad, Mujahid ; Halbach, Ralph ; Seguin, Chris
Author_Institution :
Microelectron., Semicond. R&D Center, IBM, Essex Junction, VT, USA
Abstract :
BEOL Metal structures were characterized for defining ESD current handling capability, once a failure criterion is established; a current density analysis tool is used to simulate the results. The current density tool can identify metal fails for simple structures and needs update for complex current path. The tool is important for a designer to verify and update any weak path that may degrade the design.
Keywords :
current density; electrostatic discharge; failure analysis; BEOL metal structures; ESD stress; complex current path; current density analysis tool; failure criterion; Current density; Electrostatic discharge; Fingers; Integrated circuit interconnections; Metals; Resistance; Shape;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd
Conference_Location :
Anaheim, CA
Electronic_ISBN :
Pending
