Title :
Novel Potentiometric Silicon Sensor For Medical Devices
Author :
Schnakenberg, Uwe ; Lisec, Thomas ; Hintsche, Rainer ; Kuna, Ingrid ; Uhlig, Albrecht ; Wagner, Bernd
Author_Institution :
Fraunhofer-Institut fur Siliziumtechnologie
Keywords :
Back; Biomembranes; Catheters; Chemical sensors; Electrodes; Etching; Fabrication; Micromachining; Platinum; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.722001
