Flow-through ordered macroporous silicon sensor for liquids detection

Author

Parashchenko, Maksim A. ; Filippov, Nicolay S. ; Kirienko, Victor V. ; Romanov, Sergey I.

Author_Institution

A.V. Rzhanov Inst. of Semicond. Phys., Novosibirsk, Russia

fYear

2013

fDate

1-5 July 2013

Firstpage

25

Lastpage

26

Abstract

This paper has been devoted to a creation of flow-through sensor based on ordered macroporous silicon for electrophysical detection of liquids. Interactions of sensor with different liquids (deionized water, ethyl alcohol and sodium tetraborate in various concentrations) were studied by high frequency conductance measurements. It was established that the sensor had specific response for each liquid. It was shown that the proposed electrophysical method allowed identifying the liquid flowing through the sensor.

Keywords

electric admittance measurement; electric sensing devices; elemental semiconductors; flow through porous media; organic compounds; porous semiconductors; silicon; water; H₂O; Si; deionized water; electrophysical detection; ethyl alcohol; flow-through ordered macroporous silicon sensor; high frequency conductance measurements; liquid detection; sodium tetraborate; Biology; Conductivity; Frequency measurement; Liquids; Microchannel; Silicon; Temperature measurement; Ordered macroporous silicon; electrical sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists on

Conference_Location

Novosibirsk

ISSN

2325-4173

Print_ISBN

978-1-4799-0761-8

Type

conf

DOI

10.1109/EDM.2013.6641931

Filename

6641931