A decentralized VPLs based control policy for semiconductor manufacturing

Author

Yao, Shiqing ; Jiang, Zhibin ; Li, Na ; Liu, Ran

Author_Institution

Dept. of Ind. Eng. & Logistics Manage., Shanghai Jiao Tong Univ., Shanghai, China

fYear

2010

fDate

7-10 Dec. 2010

Firstpage

1251

Lastpage

1255

Abstract

In this paper, we propose a decentralized VPLs based control policy for semiconductor manufacturing. Based on utilizations and entropies, a new classification method is designed to decentralize global objectives into local objectives of workstations. Then a decentralized multi-objective scheduling policy is proposed to control Virtual Production Lines (VPLs). We generate two SMS cases from a test bed in order to evaluate multiple performances of the proposed policy. Experimental results validate the effectiveness in solving multi-objective scheduling problems for the semiconductor manufacturing system.

Keywords

decentralised control; manufacturing systems; production engineering computing; scheduling; semiconductor industry; virtual manufacturing; control policy; decentralized VPL; decentralized control; decentralized multiobjective scheduling policy; semiconductor manufacturing system; virtual production lines; Dispatching; Entropy; Fabrication; Job shop scheduling; Manufacturing systems; Workstations; Decentralized scheduling; entropy; semiconductor manufacturing system (SMS); work-in-process (WIP) control;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Engineering and Engineering Management (IEEM), 2010 IEEE International Conference on

Conference_Location

Macao

ISSN

2157-3611

Print_ISBN

978-1-4244-8501-7

Electronic_ISBN

2157-3611

Type

conf

DOI

10.1109/IEEM.2010.5674371

Filename

5674371