DocumentCode
182545
Title
Fabrication of relatively thin diamond films for short mm wave and THz TWT windows
Author
Ding, Ming Q. ; Lili Li ; Jinjun Feng
Author_Institution
Nat. Key Lab. of Sci. & Technol. on Vacuum Electron., Beijing Vacuum Electron. Res. Inst., Beijing, China
fYear
2014
fDate
22-24 April 2014
Firstpage
461
Lastpage
462
Abstract
To improve mechanical properties of relatively thin diamond films used in short mm wave and THz TWT windows, we propose a novel fabrication process, in which an ultra-nanocrystalline diamond (UNCD) process is incorporated into the conventional polycrystalline diamond (PCD) deposition. This paper describes the fabrication method, growing process of UNCD on PCD and improvement in fracture strength of the composite diamond films.
Keywords
diamond; fracture toughness; nanofabrication; nanostructured materials; plasma CVD; travelling wave tubes; PCD deposition; THz TWT windows; UNCD process; composite diamond films; fracture strength; polycrystalline diamond deposition; relatively thin diamond films; short mm wave TWT windows; ultra-nanocrystalline diamond process; Diamonds; Fabrication; Films; Mechanical factors; Rough surfaces; Surface morphology; Surface treatment; PCD; THz TWTs; UNCD; mechanical properties;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, IEEE International
Conference_Location
Monterey, CA
Type
conf
DOI
10.1109/IVEC.2014.6857689
Filename
6857689
Link To Document