The effect of treatment in highly-ionized medium on the structural and optical properties of proton exchanged planar waveguides in LiNbO3

Author

Salgaeva, Uliana O. ; Volyncev, Anatoly B. ; Sidorov, Denis I. ; Mushinsky, Sergey S. ; Kichigin, Vladimir I. ; Petukhov, I.V.

Author_Institution

Perm Sci.-Ind. Instrum. Making Co., Perm, Russia

fYear

2013

fDate

1-5 July 2013

Firstpage

217

Lastpage

222

Abstract

The effect of highly-ionized medium (plasma) with variable composition on the optical and structural properties of the proton exchanged planar waveguides in lithium niobate is described in this paper. This effect was investigated by prism coupling method and X-ray diffraction analysis. The evolution of optical and structural properties of proton exchanged waveguides treated in plasma was also studied after high temperature annealing. It was determined that the waveguide contrast (Δn) decreased and the depth of waveguide increased, but there were no significant deformations of near-surface region; and other effects generated by treatment in plasma with variable composition were detected.

Keywords

X-ray diffraction; annealing; ion exchange; lithium compounds; optical fabrication; optical planar waveguides; plasma materials processing; LiNbO₃; X-ray diffraction analysis; high-temperature annealing; highly-ionized medium; lithium niobate; planar waveguides; plasma treatment; prism coupling method; proton exchange; waveguide contrast; Annealing; Lattices; Optical waveguides; Plasmas; Protons; Surface treatment; X-ray diffraction; Lithium Niobate; plasma; waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists on

Conference_Location

Novosibirsk

ISSN

2325-4173

Print_ISBN

978-1-4799-0761-8

Type

conf

DOI

10.1109/EDM.2013.6641979

Filename

6641979