Technologies and architectures for autonomous "MEMS" microrobots

In this work, a novel approach to realize an autonomous micro-robot is addressed. Full CMOS compatible silicon micro-machining processes have been adopted to realize the mechanical parts of the system. An innovative photothermo-mechanical actuation strategy together with silicon micro-machining technology are used for the realization of thermal micro-actuators which act as legs. The basic idea is to provide the actuation energy needed for the motion of the system through a light source and to improve the thermo-electro-mechanical efficiency by using an array of micro-lenses that concentrate the energy of the light beam on a small region of the actuators. Novel smart optical structures, based on photonic band gap materials, realized by using several periods of suitable metal-dielectric couples must be selectively deposited over the micro-lenses in order to suitably address the motion of the legs