Title :
Nano-structured ZnO/ITO based SO2 detector in room temperature operation
Author :
Memon, U.B. ; Ibrahim, A. ; Duttagupta, S.P. ; Roy, S.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol., Mumbai, Mumbai, India
Abstract :
ZnO Nanostructured thin film of thickness 200nm was deposited on quartz by spray pyrolysis technique; further interdigitated ITO electrodes were fabricated by lithography. Compositional, surface morphology and electrical characterization of ZnO nanostructure thin film was done using X-ray photo electron spectroscopy (XPS), Secondary electron microscopy (SEM), and current-voltage (I-V) measurement technique respectively. SO2 sensing was done by using a sealed container with the help of Keithley2400 SMU and MATLAB interface. It was observed that ZnO exhibited good response on exposure to SO2 gas.
Keywords :
II-VI semiconductors; X-ray photoelectron spectra; electric current measurement; electrochemical electrodes; gas sensors; indium compounds; nanolithography; nanostructured materials; pyrolysis; quartz; spraying; sulphur compounds; surface morphology; thin film sensors; voltage measurement; wide band gap semiconductors; zinc compounds; I-V measurement technique; Keithley2400 SMU; MATLAB interface; SEM; SO2; X-ray photoelectron spectroscopy; XPS; ZnO-ITO; compositional characterization; current-voltage measurement technique; electrical characterization; interdigitated ITO electrode; lithography; nanostructured thin film detector; quartz; secondary electron microscopy; size 200 nm; spray pyrolysis technique; surface morphology; temperature 293 K to 298 K; Electrodes; Gas detectors; II-VI semiconductor materials; Indium tin oxide; Scanning electron microscopy; Zinc oxide; SO2 gas detector; ZnO; interdigitated electrode; nanostructure;
Conference_Titel :
Physics and Technology of Sensors (ISPTS), 2015 2nd International Symposium on
Conference_Location :
Pune
DOI :
10.1109/ISPTS.2015.7220080
