Fabrication and characterization of in-house developed resistor paste as buried micro heaters in LTCC for sensor applications

Author

Kolpe, Minnath ; Giramkar, Vijaya ; Chaware, Varsha ; Joseph, Shany ; Phatak, Girish

Author_Institution

Electron. Packaging Group, Centre for Mater. for Electron. Technol. (C-MET) Panchawati, Pune, India

fYear

2015

fDate

7-10 March 2015

Firstpage

230

Lastpage

234

Abstract

This paper presents structural, morphological and electrical characterization of the in-house developed ruthenium oxide based thick film resistor pastes for buried heater applications in LTCC. The basic electrical characterization of heater shows that the designed test heater achieved temperature up to 238°C. The required power to raise the temperature up to 238°C was 1.9W. It is found that the in-house resistor paste has better shrinkage compatibility with commercial LTCC Tape as compared with the manufacturer´s own compatible resistor paste.

Keywords

ceramics; microfabrication; microsensors; ruthenium compounds; shrinkage; temperature measurement; temperature sensors; thick film resistors; thick film sensors; LTCC; RuO₂; buried microheater application; electrical characterization; in-house developed ruthenium oxide based thick film resistor paste; morphological characterization; power 1.9 W; sensor application; shrinkage compatibility; structural characterization; Powders; Resistance; Resistance heating; Resistors; Temperature sensors; Thermistors; Heaters; LTCC; Resistor paste; Thermistors; Thick film;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics and Technology of Sensors (ISPTS), 2015 2nd International Symposium on

Conference_Location

Pune

Type

conf

DOI

10.1109/ISPTS.2015.7220118

Filename

7220118