Title :
Monolithic transformers in a five metal CMOS process
Author :
Jaehnig, Jason ; Allee, David R. ; El-Sharawy, El-Badawy ; Alford, Terry L. ; Yazdi, Navid ; Allstot, David J.
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Abstract :
Four monolithic transformers and an inductor are fabricated in a 5 metal CMOS process with varying number of turns and metal thicknesses. The S-parameters are measured from 500 MHz to 5.5 GHz, and equivalent lumped element models are extracted to calculate the differential quality factor vs. frequency. The transformers demonstrated significantly higher quality factors peaking at higher frequencies compared to the inductor
Keywords :
CMOS integrated circuits; MMIC; Q-factor; UHF integrated circuits; equivalent circuits; high-frequency transformers; inductors; integrated circuit interconnections; integrated circuit measurement; integrated circuit metallisation; integrated circuit modelling; lumped parameter networks; 500 MHz to 5.5 GHz; differential quality factor; equivalent lumped element models; five metal CMOS process; metal thickness; monolithic inductor; monolithic transformers; transformer turns; CMOS process; Circuits; Frequency; Inductance; Inductors; Phase measurement; Phase noise; Q factor; Silicon; Transformers;
Conference_Titel :
Circuits and Systems, 2002. ISCAS 2002. IEEE International Symposium on
Conference_Location :
Phoenix-Scottsdale, AZ
Print_ISBN :
0-7803-7448-7
DOI :
10.1109/ISCAS.2002.1011476
