Parameter monitoring: Advantages and pitfalls

Author

van Rosmalen, M.M.A. ; Baker, K. ; Bruls, E.M.J.G. ; Jess, J.A.G.

Author_Institution

Philips Res. Lab., Eindhoven, Netherlands

fYear

1993

fDate

17-21 Oct 1993

Firstpage

115

Lastpage

124

Abstract

Complex tests are often required for the measurement of certain IC parameters. Because these tests are too expensive to include in a production test, an alternative test method is studied. Additional structures that behave identically with respect to the considered parameter, called monitors, are placed near the original structures. If a strong spatial correlation exists for the parameter, the parameter values of the monitors can be used to predict the parameter values of the products. It is shown that, by means of monitor measurement data regression, the prediction can be improved. An analysis of the resulting prediction error is presented, which is used to evaluate the method for specific cases

Keywords

VLSI; error analysis; integrated circuit modelling; integrated circuit testing; integrated circuit yield; monitoring; production testing; statistical analysis; IC parameters; analysis; measurement data regression; monitors; parameter monitoring; prediction error; production test; Analog integrated circuits; Condition monitoring; Digital integrated circuits; Economic forecasting; Integrated circuit testing; Laboratories; Phase change materials; Production; System testing; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Test Conference, 1993. Proceedings., International

Conference_Location

Baltimore, MD

Print_ISBN

0-7803-1430-1

Type

conf

DOI

10.1109/TEST.1993.470711

Filename

470711