Title :
Fabrication of advanced integrated optical micro-encoder chip
Author :
Sawada, R. ; Ohguchi, O. ; Mise, K. ; Tsubamoto, M.
Author_Institution :
Interdisciplinary Res. Labs., NTT, Tokyo, Japan
Abstract :
An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters
Keywords :
integrated optics; gradient-refractive-index-lens film; grating scale; integrated optical micro-encoder chip; laser diode; microencoder; optical films; phase-shifting film; polyimide waveguides; traveling direction; traveling displacement; Diode lasers; Displacement measurement; Integrated optics; Lenses; Microoptics; Mirrors; Optical device fabrication; Optical films; Optical waveguides; Photodiodes;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555836
