Monte-Carlo simulation of a micro focal X-ray tube

A modified version of the EGS4 code is presented in which the inelastic collisions of electrons with atoms takes into account bound effects. This code was then used in the simulation of an X-ray tube with molybdenum target. A comparison with experimental data, for 30 keV and 35 keV electrons beams, shows a maximum difference of 30% near the K_α peak. The dependence of the fluorescence to bremsstrahlung ratio on the target thickness (roughly 40% in the region 4-6 μm), our uncertainty in the dimension of the target used, and the inaccurate modeling of bremsstrahlung emissions makes us believe that the GOS model is fairly accurate on the treatment of electron inelastic collisions, and that the low energy electron transport with EGS4 can be improved using this model