Cell Broadband Engine performance and yield benchmark in 65nm SOI CMOS with spatial, temporal and parametric process variability model

This paper introduces a process variability model to determine the performance and yield of the cell broadband engine (CBE) in 65 nm SOI CMOS. The model incorporates spatial (die-to-die), temporal (manufacturing process drift), and parametric dimensions, and provides microprocessor performance tracking and comprehensive view on the process variability with embedded ring oscillator measurement at the wafer level. It extracts CBE performance regularity within die for the circuit design and models, and reveals the semiconductor manufacturing signatures in wafers and lots for process technology. The model reduces performance estimation testing requirements by surpassing conventional methodspsila accuracy by 28%.