Title :
Integrated microwave sensor for cavity-length measurement with sub-millimeter accuracy
Author :
Megej, A. ; Beilenhoff, K. ; Schussler, Martin ; Ziroff, A. ; Mottet, B. ; Yilmazoglu, O. ; Mutamba, K. ; Hamann, C.D. ; Baican, R. ; Hartnagel, H.L.
Author_Institution :
Inst. fur Hochfreuenztechnik, Technische Universitat Darmstadt, Germany
Abstract :
A novel measurement procedure using microwaves is presented. The implemented sensor determines the length of a cylindrical cavity (e.g. hydraulic system) with sub-millimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.
Keywords :
cavity resonators; length measurement; microwave detectors; microwave measurement; cavity length measurement; cavity resonator; cylindrical cavity; hydraulic system; integrated microwave sensor; real-time operation; resonance frequency distribution; sub-millimeter accuracy; Cavity resonators; Dielectric measurements; Hydraulic systems; Integrated circuit measurements; Mechanical sensors; Microwave measurements; Microwave sensors; Resonance; Resonant frequency; Sensor phenomena and characterization;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011703
