DocumentCode
1832311
Title
Integrated microwave sensor for cavity-length measurement with sub-millimeter accuracy
Author
Megej, A. ; Beilenhoff, K. ; Schussler, Martin ; Ziroff, A. ; Mottet, B. ; Yilmazoglu, O. ; Mutamba, K. ; Hamann, C.D. ; Baican, R. ; Hartnagel, H.L.
Author_Institution
Inst. fur Hochfreuenztechnik, Technische Universitat Darmstadt, Germany
Volume
2
fYear
2002
fDate
2-7 June 2002
Firstpage
643
Abstract
A novel measurement procedure using microwaves is presented. The implemented sensor determines the length of a cylindrical cavity (e.g. hydraulic system) with sub-millimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.
Keywords
cavity resonators; length measurement; microwave detectors; microwave measurement; cavity length measurement; cavity resonator; cylindrical cavity; hydraulic system; integrated microwave sensor; real-time operation; resonance frequency distribution; sub-millimeter accuracy; Cavity resonators; Dielectric measurements; Hydraulic systems; Integrated circuit measurements; Mechanical sensors; Microwave measurements; Microwave sensors; Resonance; Resonant frequency; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location
Seattle, WA, USA
ISSN
0149-645X
Print_ISBN
0-7803-7239-5
Type
conf
DOI
10.1109/MWSYM.2002.1011703
Filename
1011703
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