Title :
High efficiency detection of tritium using silicon avalanche photodiodes
Author :
Shah, K.S. ; Gothoskar, P. ; Farrell, R. ; Gordon, J.
Author_Institution :
RMD Inc., Watertown, MA, USA
Abstract :
This paper describes our recent work in developing low noise silicon avalanche photodiodes (APD) for detection of tritium (3 H) β-particles with high efficiency. In view of the very low energy of 3H β-particles (Emax=18 keV), research was carried out to produce APD structures with a very thin entrance window. This involved using low energy boron implantation into the APD front surface, followed by pulsed excimer laser annealing of the implanted face to form a p+ contact. The resulting devices had a surface dead layer of about 0.07 to 0.1 μm and operated with low noise threshold (250-300 eV) for 2×2 mm2 size. The 3H β-particle detection efficiency was measured to be approximately 50%. This is about the twice the detection efficiency achieved with standard APDs
Keywords :
avalanche photodiodes; beta-ray detection; ion implantation; laser beam annealing; semiconductor device noise; silicon radiation detectors; β-particle detection efficiency; 0.07 to 0.1 mum; 18 keV; 250 to 300 eV; Si avalanche photodiodes; Si:B; T; low energy B implantation; low noise; noise threshold; p+ contact; pulsed excimer laser annealing; surface dead layer; thin entrance window; tritium detection; Avalanche photodiodes; Boron; Electrodes; Semiconductor device noise; Signal to noise ratio; Silicon; Solid scintillation detectors; Surface emitting lasers; X-ray detection; X-ray detectors;
Conference_Titel :
Nuclear Science Symposium, 1996. Conference Record., 1996 IEEE
Conference_Location :
Anaheim, CA
Print_ISBN :
0-7803-3534-1
DOI :
10.1109/NSSMIC.1996.591469