Title :
Gas damping model for a RF MEM switch and its dynamic characteristics
Author :
Veijola, T. ; Tinttunen, T. ; Nieminen, H. ; Ermolov, V. ; Ryhanen, T.
Author_Institution :
Dept. of Electr. & Commun. Eng., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
A compact model for a capacitive RF MEM switch with damping is presented. The damping model is based on analytic expressions for flow resistances due to the rarefied air flow in the gap and in the perforation holes. The complete switch model is constructed of elements resulting from the discretization of the beam deflection equation and has been implemented as a nonlinear electrical equivalent circuit. The model reproduces the beam displacement accurately. Comparison with measured transient on/off capacitance characteristics shows very good agreement.
Keywords :
UHF devices; channel flow; damping; deformation; electrostatic actuators; equivalent circuits; flow simulation; microfluidics; microwave switches; modelling; beam deflection equation; beam displacement; capacitive RF MEMS switch; circuit simulation model; dynamic characteristics; flow resistances; gap; gas damping model; nonlinear electrical equivalent circuit; perforated beam; perforation holes; rarefied air flow; switch model; switching characteristics; Bridge circuits; Capacitance; Communication switching; Damping; Electrostatics; Equivalent circuits; Radio frequency; Springs; Switches; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011874
