Title :
Polyimide film based RF MEMS capacitive switches
Author :
Ramadoss, R. ; Lee, S. ; Bright, V.M. ; Lee, Y.C. ; Gupta, K.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO, USA
Abstract :
A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.
Keywords :
UHF devices; coplanar waveguides; electrostatic actuators; membranes; microassembling; microwave switches; polymer films; 0.32 dB; 73 V; CPW line; L-band operation; RF MEMS capacitive switch; RF performance; actuation voltages; insertion loss; microelectromechanical switch; polyimide film based MEMS switches; polyimide structural membrane layer; printed antenna integration; shunt-mounted switches; switch assembly; switch fabrication; Assembly; Biomembranes; Coplanar waveguides; Fabrication; Low voltage; Performance loss; Polyimides; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011882
