A 16-site neural recording probe array and its circuit model simulation

Author

Jianhui, Lin ; Xiaoming, Wu ; Pengsheng, Huang ; Tianling, Ren ; Litian, Liu

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2005

fDate

26-28 May 2005

Firstpage

68

Lastpage

71

Abstract

This paper introduces a simple MEMS (micro electromechanical system) process to fabricate a 16-site neural recording probe array and gives a detailed characterization of the neuron-electrode interface, based on the equivalent circuit approach. The impedance magnitude of the probes shows approximately a constant slope of f^-0.75 from 100Hz up to 1MHz. The action potential can be simulated by the general-purpose circuit simulation program, such as HSPICE. The responses of the microelectrodes act as a function of several parameters, such as the sealing resistance and input resistance of the preamplifier. The responses are not sensitive to the changes of the microelectrode parameters. However, appreciable influence of the parasitic capacitance was obtained when the sealing resistance was large (e.g. 100MΩ).

Keywords

SPICE; bioelectric potentials; biomedical electrodes; biomedical electronics; capacitance; electric resistance; microelectrodes; micromechanical devices; neurophysiology; preamplifiers; HSPICE; MEMS; action potential simulation; circuit model simulation; input resistance; microelectrodes; microelectromechanical system fabrication; neural recording probe array; neuron-electrode interface characterization; parasitic capacitance; sealing resistance; Circuit simulation; Electrodes; Equivalent circuits; Impedance; Microelectrodes; Micromechanical devices; Probes; Silicon; Sputter etching; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Neural Interface and Control, 2005. Proceedings. 2005 First International Conference on

Print_ISBN

0-7803-8902-6

Type

conf

DOI

10.1109/ICNIC.2005.1499844

Filename

1499844