Title :
Comparison of On-Wafer Calibrations
Author :
Williams, Dylan F. ; Marks, Roger B. ; Davidson, Andrew
Author_Institution :
National Institute of Standards and Technology, Mail Code 813.01, 325 Broadway, Boulder, CO 80303
Abstract :
A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.
Keywords :
Calibration; Coplanar waveguides; Impedance measurement; Microwave measurements; NIST; Power transmission lines; Scattering parameters; Testing; Transmission line matrix methods; Transmission line measurements;
Conference_Titel :
ARFTG Conference Digest-Winter, 38th
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1991.324040
