• DocumentCode
    1837393
  • Title

    Comparison of On-Wafer Calibrations

  • Author

    Williams, Dylan F. ; Marks, Roger B. ; Davidson, Andrew

  • Author_Institution
    National Institute of Standards and Technology, Mail Code 813.01, 325 Broadway, Boulder, CO 80303
  • Volume
    20
  • fYear
    1991
  • fDate
    Dec. 1991
  • Firstpage
    68
  • Lastpage
    81
  • Abstract
    A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.
  • Keywords
    Calibration; Coplanar waveguides; Impedance measurement; Microwave measurements; NIST; Power transmission lines; Scattering parameters; Testing; Transmission line matrix methods; Transmission line measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    ARFTG Conference Digest-Winter, 38th
  • Conference_Location
    San Diego, CA, USA
  • Print_ISBN
    0-7803-5686-1
  • Type

    conf

  • DOI
    10.1109/ARFTG.1991.324040
  • Filename
    4119616
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1837393