Title :
Relaxation Analysis of Two Hinged Ends Micro-plate Based on Euler-Bernoulli Equation
Author :
Zhu Xiaowei ; Sun Liming
Author_Institution :
Sch. of Sci., Xi´an Technol. Univ., Xi´an, China
Abstract :
In order to explore relaxation characteristic of micro-plate in MEMS, the deflection relaxation expression of micro-plate with two hinged ends was educed Based on Euler-Bernoulli equation. The deflection relaxation process of micro-plate under over-damping, critical-damping and under-damping was calculated used Maple. The relaxation simulation data of micro-plate with different length-width ratio used ANSYS conformed to theoretical calculation Based on Euler-Bernoulli equation and the relaxation time decrease significantly with the increase of width under over damping and critical damping relaxation simulation.
Keywords :
damping; mathematics computing; matrix algebra; micromechanical devices; ANSYS; Euler-Bernoulli equation; MEMS; Maple; critical-damping; deflection relaxation expression; microplate; over-damping; relaxation analysis; under-damping; Damping; Data models; Dynamics; Equations; Finite element analysis; Mathematical model; Numerical models; EulerBernoulli equation; air damping; micro-plate; relaxation;
Conference_Titel :
Intelligent Human-Machine Systems and Cybernetics (IHMSC), 2013 5th International Conference on
Conference_Location :
Hangzhou
Print_ISBN :
978-0-7695-5011-4
DOI :
10.1109/IHMSC.2013.274
