Title :
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)
Abstract :
The following topics are dealt with: factory design; manufacturing strategy and structure; manufacturing control and execution; process and metrology equipment; process and material optimization; environment, safety and health; yield enhancement and methodology; and ultraclean technology
Keywords :
clean rooms; industrial control; integrated circuit manufacture; manufacturing processes; optimisation; safety; semiconductor device manufacture; surface cleaning; factory design; health; manufacturing control; manufacturing strategy; material optimization; metrology equipment; process equipment; process optimization; safety; semiconductor manufacturing; ultraclean technology; yield enhancement;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA, USA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962900
