Title :
Interoperable communication specification for AMHS
Author :
Andou, Koji ; Kondo, Hiroshi ; Masui, Tomoyuki
Author_Institution :
Semicond. Leading Edge Technol. Inc., Kanagawa, Japan
Abstract :
300 mm semiconductor factories require the combination of different types of AMHS (Automated Material Handling System) components from different suppliers for optimal AMHS solutions. To realize it, interoperable communication specification for AMHS is required. Selete (Semiconductor Leading Edge Technologies, Inc) has developed it by discussing with member companies of Selete and cooperative AMHS vendors about implementation level requirement specifications, and confirming its interoperability by evaluating actual behaviors of AMHS components in which the above mentioned specifications are implemented. This specification contributes to reduce the cost and time of the communication interface development in AMHS vendors and semiconductor manufacturers when AMHS components from two or more vendors are combined
Keywords :
integrated circuit manufacture; materials handling; 300 mm; 300mm diameter wafer; AMHS vendors; Selete; cost; interface development; interoperability; semiconductor manufacturers; Automatic control; Costs; Fabrication; Lead compounds; Manufacturing automation; Materials handling; Production facilities; Productivity; Semiconductor device manufacture; Standardization;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962904
