Optimization and economic analysis for tool portfolio planning in semiconductor manufacturing

Author

Wu, C.-S. ; Chou, Y.-C. ; Lin, J.-Z.

Author_Institution

Nat. Taiwan Univ., Taipei, Taiwan

fYear

2001

fDate

2001

Firstpage

33

Lastpage

36

Abstract

The tool portfolio of a plant refers to the makeup, in quantity and type, of processing machines in the plant. Portfolio planning is a multi-criteria decision-making task involving trade-offs between investment cost, throughput, cycle time and risk. In this paper, an economic decision model is first presented for optimal configuration of portfolio and to determine optimal factory loading. If plants are closely located or have a twin-fab design, portfolio planning at multiple plants can be integrated to enhance the overall effectiveness of portfolios. A novel methodology for arbitrating capacity backup between multiple plants is described in the second part. Finally, robust configuration of portfolio in a dynamic demand environment is addressed. Industry data have been utilized to run through the developed methodologies

Keywords

computer aided production planning; electronic engineering computing; integrated circuit economics; manufacturing resources planning; optimisation; cycle time; dynamic demand environment; economic analysis; economic decision model; investment cost; multi-criteria decision-making task; multiple plant portfolio planning; optimal factory loading; optimal portfolio configuration; optimization; overall portfolio effectiveness; processing machines; risk; robust portfolio configuration; semiconductor manufacturing; throughput; tool portfolio; tool portfolio planning; twin-fab design; Costs; Environmental economics; Investments; Performance analysis; Portfolios; Production facilities; Queueing analysis; Robustness; Semiconductor device manufacture; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Symposium, 2001 IEEE International

Conference_Location

San Jose, CA

Print_ISBN

0-7803-6731-6

Type

conf

DOI

10.1109/ISSM.2001.962908

Filename

962908