Title :
The development of security system and visual service support software for on-line diagnostics
Author :
Inaba, Masayuki ; Aizono, Takeiki ; Sonobe, Kenichiro ; Fukube, Hitoshi ; Iizumi, Takashi ; Arima, Juntaro ; Usami, Yasutsugu
Author_Institution :
Hitachi Ltd., Kawasaki, Japan
Abstract :
Hitachi´s CD-SEM achieves the highest tool availability in the industry. However, efforts to further our performance are continuously underway. The proposed on-line diagnostics system can allow senior technical staff to monitor and investigate tool status by connecting the equipment supplier and the device manufacturer sites through the Internet. The advanced security system ensures confidentiality by firewalls, digital certification, and advanced encryption algorithms to protect device manufacturer data from unauthorized access. Service support software, called DDS (defective part diagnosis support system), will analyze the status of mechanical, evacuation, and optical systems. Its advanced overlay function on a timing chart identifies failed components in the tool and allows on-site or remote personnel to predict potential failures prior to their occurrence. Examples of application shows that the proposed system is expected to reduce repair time, improve availability and lower cost of ownership
Keywords :
computerised monitoring; cryptography; failure analysis; fault diagnosis; integrated circuit measurement; integrated circuit yield; internetworking; maintenance engineering; process monitoring; production engineering computing; production testing; scanning electron microscopy; CD-SEM; DDS service support software; Internet; confidentiality; cost of ownership; device manufacturer data access; device manufacturer sites; digital certification; encryption algorithms; equipment supplier sites; evacuation systems; failed component identification; failure prediction; firewalls; mechanical systems; on-line diagnostics; on-line diagnostics system; optical systems; overlay function; repair time; security system; timing chart; tool availability; tool monitoring; tool performance; tool status; visual service support software; Availability; Certification; Cryptography; Data security; Internet; Joining processes; Manufacturing industries; Monitoring; Protection; Timing;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962911
