DocumentCode :
1838080
Title :
Surface Wave Phenomenon in Wafer Probing Environments
Author :
Godshalk, Edward M.
Author_Institution :
Cascade Microtech, Inc., Beaverton, OR
Volume :
22
fYear :
1992
fDate :
Dec. 1992
Firstpage :
10
Lastpage :
19
Abstract :
Investigation of microwave and millimeter wave propagation in dielectric slabs and along coplanar transmission lines on dielectric slabs, reveal effects that may be explained by surface wave phenomenon. These surface waves can be transmitted and received with wafer probes and influence the transmission characteristics of coplanar transmission lines. This paper presents measured data showing the presence of surface waves and how they interact with wafer probes and coplanar waveguide transmission lines. Methods for minimizing these interactions are explored and quantified. A discussion of surface wave effects on wafer calibrations is included.
Keywords :
Coplanar transmission lines; Dielectric measurements; Microwave propagation; Millimeter wave measurements; Millimeter wave propagation; Millimeter wave technology; Probes; Slabs; Surface waves; Transmission line measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
ARFTG Conference Digest-Fall, 40th
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5686-1
Type :
conf
DOI :
10.1109/ARFTG.1992.326994
Filename :
4119652
Link To Document :
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