Title :
An automatic monitor management system for effective 300 mm fab operations
Author :
Wu, Chung-Shen ; Liao, Da-Yin
Author_Institution :
Taiwan Semicond. Manuf. Co., Taiwan
Abstract :
This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations
Keywords :
computer integrated manufacturing; computerised monitoring; integrated circuit manufacture; process monitoring; 300 mm; 300 mm mass production fab; CIM systems; IC production; automatic monitor management system; semiconductor manufacture; Computer integrated manufacturing; Computerized monitoring; Fabrication; Manufacturing automation; Manufacturing processes; Mass production; Pulp manufacturing; Robust control; Semiconductor device manufacture; Semiconductor device reliability;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962924
