DocumentCode
1838411
Title
Total dose effects and SEE screening on MEMS COTS accelerometers
Author
Cournar, O. ; Miller, Florent ; Buard, Nadine ; Poirot, Patrick ; Gaillard, Rémi ; Marchand, Laurent
Author_Institution
EADS-ST, Les Mureaux, France
fYear
2004
fDate
22-22 July 2004
Firstpage
125
Lastpage
129
Abstract
Two families of MEMS COTS are characterized for the total dose response, latch-up and SET sensitivity. These MEMS are microelectromechanical sensors: ADXL150 and SCA 600, which are fabricated with surface and bulk micromachining techniques.
Keywords
accelerometers; micromachining; microsensors; radiation effects; MEMS COTS accelerometers; MEMS sensor; SEE screening; SET sensitivity; bulk micromachining; latch-up sensitivity; microelectromechanical sensors; surface micromachining; total dose effects; total dose response; Acceleration; Accelerometers; Capacitive sensors; Circuits; Micromachining; Micromechanical devices; Noise reduction; Packaging; Sensor phenomena and characterization; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Radiation Effects Data Workshop, 2004 IEEE
Conference_Location
Atlanta, GA, USA
Print_ISBN
0-7803-8697-3
Type
conf
DOI
10.1109/REDW.2004.1352918
Filename
1352918
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