Title :
Total dose effects and SEE screening on MEMS COTS accelerometers
Author :
Cournar, O. ; Miller, Florent ; Buard, Nadine ; Poirot, Patrick ; Gaillard, Rémi ; Marchand, Laurent
Author_Institution :
EADS-ST, Les Mureaux, France
Abstract :
Two families of MEMS COTS are characterized for the total dose response, latch-up and SET sensitivity. These MEMS are microelectromechanical sensors: ADXL150 and SCA 600, which are fabricated with surface and bulk micromachining techniques.
Keywords :
accelerometers; micromachining; microsensors; radiation effects; MEMS COTS accelerometers; MEMS sensor; SEE screening; SET sensitivity; bulk micromachining; latch-up sensitivity; microelectromechanical sensors; surface micromachining; total dose effects; total dose response; Acceleration; Accelerometers; Capacitive sensors; Circuits; Micromachining; Micromechanical devices; Noise reduction; Packaging; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Radiation Effects Data Workshop, 2004 IEEE
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-8697-3
DOI :
10.1109/REDW.2004.1352918
