New method of extraction of systematic failure component

Author

Mitsutake, K. ; Ushiku, Y. ; Arakawa, Y. ; Ishibumi, T. ; Ito, O.

Author_Institution

Process & Manuf. Eng. Center, Toshiba Corp., Yokohama, Japan

fYear

2001

fDate

2001

Firstpage

247

Lastpage

250

Abstract

We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component. By combining the analysis of the degree and the position of the systematic fault with a lot history, the problem of the processes can be solved. In this way, it is possible to enhance yield and increase productivity

Keywords

Poisson distribution; binomial distribution; failure analysis; integrated circuit yield; redundancy; semiconductor process modelling; Agile-Fab concept; IC flexible production; Poisson distribution; fault histogram; lot history; negative binomial distribution; process improvement; productivity improvement; redundancy optimisation; systematic failure component extraction; yield enhancement; yield model; Histograms; History; Indium tin oxide; Manufacturing processes; Optimization methods; Production; Productivity; Redundancy; Semiconductor device manufacture; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Symposium, 2001 IEEE International

Conference_Location

San Jose, CA

Print_ISBN

0-7803-6731-6

Type

conf

DOI

10.1109/ISSM.2001.962959

Filename

962959