• DocumentCode
    1839496
  • Title

    Characterization algorithm of failure distribution for LSI yield improvement

  • Author

    Sugimoto, Masaaki ; Tanaka, Mikio

  • Author_Institution
    Anal. Technol. Dev. Div., NEC Corp., Kanagawa, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    275
  • Lastpage
    278
  • Abstract
    This paper describes an improvement in our algorithm, which can efficiently characterize a process-induced random failure distribution and a design-induced systematic failure distribution from unknown-induced failure distributions of a memory LSI, to predict a reason for yield degradation in it. The algorithm analyzes a function "T(f) isn\´t greater than 1or not" related to kind and content of "f". The "f" is a divisor of distances between failure-pairs. We have expanded the algorithm, which can pick out 7 characteristic failure distributions by using relationship between the failure densities and the function "T(f)"
  • Keywords
    failure analysis; integrated circuit yield; large scale integration; LSI yield; characterization algorithm; design-induced systematic failure distribution; failure distribution; process-induced random failure distribution; Algorithm design and analysis; Degradation; Failure analysis; Histograms; Large scale integration; Mathematics; Moore´s Law; National electric code; Shape; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Symposium, 2001 IEEE International
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    0-7803-6731-6
  • Type

    conf

  • DOI
    10.1109/ISSM.2001.962966
  • Filename
    962966