Title :
System level realization and analysis of MEMS integrated voltage controlled oscillator
Author :
Chaudhuri, A.R. ; Chakraborty, S. ; Bhattacharya, A. ; Chaudhuri, A. Ray ; Bhattacharyya, T.K.
Author_Institution :
Dept. of Electron. & Electr. Eng., Indian Inst. of Technol., Kharagpur, India
Abstract :
This paper presents the system level realization of a MEMS varactor based voltage controlled oscillator (VCO). The MEMS varactor has been optimally designed with Finite Element analysis in Coventorware platform. The corresponding lumped element version of the varactor has been exported to Saber Schematic platform. Circuit of the VCO has also been implemented in Saber platform, integrating the MEMS varactors in it´s tank circuit. Performance of the VCO has been analyzed with the MEMS capacitor of 439 fF and at a frequency of 2.4 GHz. The varactor structure has been fabricated and experimentally characterized for mechanical and electrical performance.
Keywords :
UHF oscillators; finite element analysis; micromechanical devices; varactors; voltage-controlled oscillators; Coventorware platform; MEMS capacitor; MEMS varactor; Saber schematic platform; capacitance 439 fF; electrical performance; finite element analysis; frequency 2.4 GHz; lumped element version; mechanical performance; system level realization; tank circuit; voltage controlled oscillator;
Conference_Titel :
Applied Electromagnetics Conference (AEMC), 2009
Conference_Location :
Kolkata
Print_ISBN :
978-1-4244-4818-0
Electronic_ISBN :
978-1-4244-4819-7
DOI :
10.1109/AEMC.2009.5430604
