DocumentCode :
1840022
Title :
Performance of low loss RF MEMS Fixed - Fixed capacitive switch characterization
Author :
Thakur, S.K. ; SumithraDevi, K.A. ; Ranjitha, I.
Author_Institution :
Naval Res. Board, DRDO, New Delhi, India
fYear :
2009
fDate :
14-16 Dec. 2009
Firstpage :
1
Lastpage :
4
Abstract :
Microelectromechanical Systems (MEMS) for radio frequency (RF) applications or RF MEMS provides an opportunity to revolutionize the wireless communication. This paper describes the Performance of low loss Fixed-Fixed RF MEMS capacitive switch at higher frequencies. Many researchers focus on RF MEMS capacitive switch, which presents good performance at microwave frequencies. Modelling of RF MEMS devices is essential for design optimization and device reliability. One of the most important RF MEMS components is MEMS switch. A novel approach of designing the RF MEMS switch is presented here to obtain the better performance of the switch at higher frequency ranges from 0.1 to 40 GHz .The RF MEMS capacitive Fixed-Fixed switch exhibit lower losses, better reliability, and good performance at higher frequencies.
Keywords :
capacitors; microswitches; radiofrequency integrated circuits; design optimization; device reliability; fixed-fixed RF MEMS capacitive switch; frequency 0.1 GHz to 40 GHz; radio frequency applications; CMOS; Emag; MEMS; RF; Simulation; Thermoelectromechanical;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applied Electromagnetics Conference (AEMC), 2009
Conference_Location :
Kolkata
Print_ISBN :
978-1-4244-4818-0
Electronic_ISBN :
978-1-4244-4819-7
Type :
conf
DOI :
10.1109/AEMC.2009.5430610
Filename :
5430610
Link To Document :
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