• DocumentCode
    1840022
  • Title

    Performance of low loss RF MEMS Fixed - Fixed capacitive switch characterization

  • Author

    Thakur, S.K. ; SumithraDevi, K.A. ; Ranjitha, I.

  • Author_Institution
    Naval Res. Board, DRDO, New Delhi, India
  • fYear
    2009
  • fDate
    14-16 Dec. 2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Microelectromechanical Systems (MEMS) for radio frequency (RF) applications or RF MEMS provides an opportunity to revolutionize the wireless communication. This paper describes the Performance of low loss Fixed-Fixed RF MEMS capacitive switch at higher frequencies. Many researchers focus on RF MEMS capacitive switch, which presents good performance at microwave frequencies. Modelling of RF MEMS devices is essential for design optimization and device reliability. One of the most important RF MEMS components is MEMS switch. A novel approach of designing the RF MEMS switch is presented here to obtain the better performance of the switch at higher frequency ranges from 0.1 to 40 GHz .The RF MEMS capacitive Fixed-Fixed switch exhibit lower losses, better reliability, and good performance at higher frequencies.
  • Keywords
    capacitors; microswitches; radiofrequency integrated circuits; design optimization; device reliability; fixed-fixed RF MEMS capacitive switch; frequency 0.1 GHz to 40 GHz; radio frequency applications; CMOS; Emag; MEMS; RF; Simulation; Thermoelectromechanical;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applied Electromagnetics Conference (AEMC), 2009
  • Conference_Location
    Kolkata
  • Print_ISBN
    978-1-4244-4818-0
  • Electronic_ISBN
    978-1-4244-4819-7
  • Type

    conf

  • DOI
    10.1109/AEMC.2009.5430610
  • Filename
    5430610