DocumentCode
1840022
Title
Performance of low loss RF MEMS Fixed - Fixed capacitive switch characterization
Author
Thakur, S.K. ; SumithraDevi, K.A. ; Ranjitha, I.
Author_Institution
Naval Res. Board, DRDO, New Delhi, India
fYear
2009
fDate
14-16 Dec. 2009
Firstpage
1
Lastpage
4
Abstract
Microelectromechanical Systems (MEMS) for radio frequency (RF) applications or RF MEMS provides an opportunity to revolutionize the wireless communication. This paper describes the Performance of low loss Fixed-Fixed RF MEMS capacitive switch at higher frequencies. Many researchers focus on RF MEMS capacitive switch, which presents good performance at microwave frequencies. Modelling of RF MEMS devices is essential for design optimization and device reliability. One of the most important RF MEMS components is MEMS switch. A novel approach of designing the RF MEMS switch is presented here to obtain the better performance of the switch at higher frequency ranges from 0.1 to 40 GHz .The RF MEMS capacitive Fixed-Fixed switch exhibit lower losses, better reliability, and good performance at higher frequencies.
Keywords
capacitors; microswitches; radiofrequency integrated circuits; design optimization; device reliability; fixed-fixed RF MEMS capacitive switch; frequency 0.1 GHz to 40 GHz; radio frequency applications; CMOS; Emag; MEMS; RF; Simulation; Thermoelectromechanical;
fLanguage
English
Publisher
ieee
Conference_Titel
Applied Electromagnetics Conference (AEMC), 2009
Conference_Location
Kolkata
Print_ISBN
978-1-4244-4818-0
Electronic_ISBN
978-1-4244-4819-7
Type
conf
DOI
10.1109/AEMC.2009.5430610
Filename
5430610
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