Title :
A novel low actuation voltage RF MEMS shunt capacitive switch
Author :
Sahu, Anil Kumar ; Sarkar, B.K.
Author_Institution :
Radar Div., Chandipur (DRDO), Balasore, India
Abstract :
A low actuation voltage MEMS shunt capacitive switch has been investigated in this paper. The MEMS switch is a freely moving membrane over co planar waveguide, the beam of the switch is serpentine spring and actuation is achieved by electrostatic mechanism. Actuation voltage achieved is of the order of 4 to 5 volt with down state capacitance of 3.77 pF and spring constant of 1.451 N/m.
Keywords :
membranes; microswitches; microwave switches; planar waveguides; RF MEMS shunt capacitive switch; capacitance 3.77 pF; down state capacitance; electrostatic mechanism; freely moving membrane; low actuation voltage; planar waveguide; serpentine spring; spring constant; voltage 4 V to 5 V; Actuation voltage; co planar waveguide; down state capacitance; serpentine spring; spring constant;
Conference_Titel :
Applied Electromagnetics Conference (AEMC), 2009
Conference_Location :
Kolkata
Print_ISBN :
978-1-4244-4818-0
Electronic_ISBN :
978-1-4244-4819-7
DOI :
10.1109/AEMC.2009.5430612
