Evaluation of advantages of integrating 300 mm AMHS fab layouts in the photo area

As the industry prepares for more realistic automated material handling intrabay designs it is becoming necessary to make decisions about feasible configurations of the layouts that are going to be used One of the questions that still remains unanswered, that is addressed in this paper, is the level of interconnectivity among the different bays through the intrabay automated material handling system. This paper summarizes a study that compares three different options for intrabay layouts and provides conclusions based on results from static and dynamic analysis. The three options were evaluated based on the impact each one of them has on total distance traveled by the lots, average delivery and transport times, vehicle counts and equipment set