• DocumentCode
    1840264
  • Title

    Compensation for Substrate Permittivity in Probe-Tip Calibration

  • Author

    Williams, Dylan F. ; Marks, Roger B.

  • Author_Institution
    National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80303
  • Volume
    26
  • fYear
    1994
  • fDate
    Dec. 1994
  • Firstpage
    20
  • Lastpage
    30
  • Abstract
    We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.
  • Keywords
    Calibration; Capacitance measurement; Coplanar waveguides; Gallium arsenide; Impedance; Measurement standards; Permittivity measurement; Probes; Scattering parameters; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    ARFTG Conference Digest-Fall, 44th
  • Conference_Location
    Boulder, CO, USA
  • Print_ISBN
    0-7803-5686-1
  • Type

    conf

  • DOI
    10.1109/ARFTG.1994.327077
  • Filename
    4119752
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1840264