Title :
Capacity calculation of an AGV system in a MP2 wafer fab by means of simulation
Author :
Ronney, M. ; van der Burgt, M. ; Smit, T. ; Rooda, J.E.
Author_Institution :
Eindhoven Univ. of Technol., Netherlands
Abstract :
The transport of wafers inside a multiprocess multiproduct wafer factory is a complex logistic process. In Philips´ MOS-3 waferfab this transport is carried out by a so-called automated guided vehicle (AGV) system. In this paper a dynamic model is presented of the AGV system of MOS-3. The advantages of creating such a model are twofold. First of all, the model can be used to analyse the logistics, layout, algorithms and behaviour of the current AGV system. Secondly, the model can analyse and optimise possible changes that can be made to the AGV system in the future
Keywords :
automatic guided vehicles; digital simulation; factory automation; integrated circuit manufacture; materials handling; semiconductor process modelling; AGV system; MP2 wafer fab; Philips´ MOS-3 wafer fab; automated guided vehicle; capacity calculation; complex logistic process; dynamic model; multiprocess multiproduct factory; wafer transport; Algorithm design and analysis; Command languages; Joining processes; Layout; Logistics; Power system modeling; Production facilities; Semiconductor device modeling; Vehicle dynamics; Vehicles;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962996
