Minimizing electrostatic charge generation and ESD event in TFT-LCD production equipment

Author

Kim, Dong-Sun ; Lim, Chun-Bae ; Oh, Du-Seok ; Ho, Won-Joon ; Jeong, Ju-Young ; Park, Byeong-Hoo ; Kim, Tae-Young ; Suh, Kwang S.

Author_Institution

Manuf. Technol. Center, LG Display, Paju, South Korea

fYear

2012

fDate

9-14 Sept. 2012

Firstpage

1

Lastpage

6

Abstract

This paper reports the results of investigations into electrostatic charging effects of a separation between glass and stage in TFT LCD manufacturing process. Generated electrostatic charge is closely related with vacuum pressure to hold the glass, holding times, separation cycles, and lift pin up height/speed. Therefore, effects on these factors are studied and a correlation between ESD damage and lift pin materials is analyzed. To avoid ESD damage and to minimize the charge generation during separation process, we suggest that the optimization of process condition and materials are required in addition to grounding and ionization.

Keywords

electrostatic discharge; ionisation; liquid crystal displays; manufacturing processes; thin film transistors; ESD damage; ESD event; TFT LCD manufacturing process; TFT-LCD production equipment; electrostatic charge generation; electrostatic charging effects; ionization; lift pin materials; process condition optimization; separation process; vacuum pressure; Electrostatic discharges; Glass; Metals; Surface charging; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th

Conference_Location

Tucson, AZ

ISSN

0739-5159

Print_ISBN

978-1-4673-1467-1

Type

conf

Filename

6333291