Title :
Comparing room ionization technologies in FPD manufacturing
Author :
Yoo, Joshua ; Kim, Dongsun ; Ho, WonJoon ; Jeong, Ju Yung ; Park, Byeong Hoo ; Steinman, Arnold
Author_Institution :
CORE INSIGHT, Seongnam, South Korea
Abstract :
In Flat Panel Display (FPD) manufacturing, automated handling charges both sides of the glass panels. Conventional ionization technology has a limited effect for ESD and particle contamination control as most of the ionizing bars are put over the top of the glass panels. But the glass has also been charged on the bottom of the panel, and as the glass gets bigger and panel transportation speeds increase, higher residual charges cause more damaging ESD Events and attract more particles. This paper examines the physical factors that have changed in FPD manufacturing and proposes alternative room ionization technology to improve ESD and particle control.
Keywords :
contamination; electrostatic discharge; flat panel displays; ionisation; manufacturing processes; ESD events; FPD manufacturing; flat panel display manufacturing; glass panels; ionizing bars; particle contamination control; room ionization technology; Capacitance; Coatings; Contamination; Electrostatic discharges; Glass; Ionization; Pollution measurement;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4673-1467-1