Title :
Cycle time advantages of mini batch manufacturing and integrated metrology in a 300 mm vertical furnace
Author :
Noben, Renzo ; Van Driel, Rien ; Claasen-Vujcic, Tanja
Author_Institution :
ASM Int. NV, Bilthoven, Netherlands
Abstract :
In order to improve cycle time in the furnace area, two alternatives are evaluated. Mini batch manufacturing and integrated metrology can both save valuable time. Dynamic simulations are used to investigate the influence of both options. The results are a cycle time improvement when going front large batch to mini batch manufacturing. The gain is up to 40% for normal lots and up to 30% for hot lots wafers. The consequence is an increase in the number of required tubes. Cycle time improvement versus costs is analysed. The cost of one hour cycle time gain is determined. Integrated metrology can save approximately 5-10% on the average cycle time
Keywords :
batch processing (industrial); furnaces; integrated circuit manufacture; 300 mm; cycle time; dynamic simulation; integrated metrology; mini batch manufacturing; semiconductor wafer fabrication; vertical furnace; Analytical models; Batch production systems; Boats; Costs; Europe; Fabrication; Furnaces; Inductors; Metrology; Silicon carbide;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.963003
