• DocumentCode
    1840591
  • Title

    Simulation and dispatching systems for production fab management

  • Author

    Ishii, Yoshiriho ; Ito, Noboru

  • Author_Institution
    Fujitsu AMD Semicond. Ltd., Aizuwakamatsu City, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    429
  • Lastpage
    432
  • Abstract
    Semiconductor manufacturing involves complicated operations, including repeated use of many types of equipment. Since the number of work-in-process (WIP) wafers is very large, in the tens of thousands, it is very difficult for operators to determine the priority of each product. Especially, without the use of information technology (IT), obtaining optimum use of equipment would be a near impossibility while maintaining the WIP balance. Many studies on the application of simulation dispatching to improve semiconductor fabs have been reported We customized part of a simulation/dispatching system based on operator expertise, implemented it, and obtained great improvements in our fabs
  • Keywords
    dispatching; management; manufacturing data processing; semiconductor device manufacture; simulation; dispatching system; information technology; production fab management; semiconductor manufacturing; simulation; work-in-process; Charge measurement; Cities and towns; Current measurement; Dispatching; Indium tin oxide; Information technology; Production facilities; Production systems; Semiconductor device manufacture; Software performance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Symposium, 2001 IEEE International
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    0-7803-6731-6
  • Type

    conf

  • DOI
    10.1109/ISSM.2001.963007
  • Filename
    963007