DocumentCode
1840591
Title
Simulation and dispatching systems for production fab management
Author
Ishii, Yoshiriho ; Ito, Noboru
Author_Institution
Fujitsu AMD Semicond. Ltd., Aizuwakamatsu City, Japan
fYear
2001
fDate
2001
Firstpage
429
Lastpage
432
Abstract
Semiconductor manufacturing involves complicated operations, including repeated use of many types of equipment. Since the number of work-in-process (WIP) wafers is very large, in the tens of thousands, it is very difficult for operators to determine the priority of each product. Especially, without the use of information technology (IT), obtaining optimum use of equipment would be a near impossibility while maintaining the WIP balance. Many studies on the application of simulation dispatching to improve semiconductor fabs have been reported We customized part of a simulation/dispatching system based on operator expertise, implemented it, and obtained great improvements in our fabs
Keywords
dispatching; management; manufacturing data processing; semiconductor device manufacture; simulation; dispatching system; information technology; production fab management; semiconductor manufacturing; simulation; work-in-process; Charge measurement; Cities and towns; Current measurement; Dispatching; Indium tin oxide; Information technology; Production facilities; Production systems; Semiconductor device manufacture; Software performance;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location
San Jose, CA
Print_ISBN
0-7803-6731-6
Type
conf
DOI
10.1109/ISSM.2001.963007
Filename
963007
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