Title :
High-sensitive organic contaminants detecting method based on cold-trap and multiple-internal-reflection FTIR [clean room air monitoring systems]
Author :
Maruo, Kazuyuki ; Maeda, Yasuhiro ; Niwano, Michio
Author_Institution :
ADVANTEST Labs. Ltd, Sendai, Japan
Abstract :
This paper presents a high-sensitivity organic contaminants detection method for clean room air. Using a Fourier Transform Infra-Red spectroscopy (FTIR), we can detect various chemical compounds including organic contaminants in a few minutes. In addition, by combining two efficient methods: Multiple Internal Reflection (MIR) and Cold Trap (CT), the sensitivity rate of detection chemical compounds rises drastically. By conducting experiments, it has been demonstrated that this sensitivity rate reaches to the order of ppb. This method will be used as an integral part of clean room air monitoring systems
Keywords :
Fourier transform spectroscopy; ULSI; air; clean rooms; condition monitoring; impurities; infrared spectroscopy; integrated circuit manufacture; organic compounds; FTIR; Fourier transform IR spectroscopy; ULSI manufacturing; chemical compounds; clean room air monitoring systems; cold trap; high-sensitivity detection method; multiple internal reflection; organic contaminants; semiconductor manfacture; semiconductor wafer processing; Chemical compounds; Fourier transforms; Infrared detectors; Infrared spectra; Optical reflection; Organic compounds; Spectroscopy; Substrates; Surface cleaning; Surface contamination;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.963017
