• DocumentCode
    1841090
  • Title

    Quasi-optical E-band MEMS switching arrays

  • Author

    Zhang, W.-K. ; Fan Jiang ; Domier, C.W. ; Luhmann, N.C., Jr.

  • Author_Institution
    Dept. of Appl. Sci., California Univ., Davis, CA, USA
  • Volume
    3
  • fYear
    2002
  • fDate
    2-7 June 2002
  • Firstpage
    1531
  • Abstract
    This paper presents modeling, design, fabrication, and testing of an E-band MEMS based quasi-optical switching array. The quasi-optical MEMS switching array has been demonstrated with an isolation of better than 10 dB from 70/spl sim/85 GHz. The maximum demonstrated ON /OFF ratio is over 15 dB at 76 GHz.
  • Keywords
    micromechanical devices; microwave switches; 70 to 85 GHz; ON/OFF ratio; isolation; quasi-optical E-band MEMS switching array; Biomembranes; Bridge circuits; Capacitance; Dielectric substrates; Micromechanical devices; Microswitches; Microwave antenna arrays; Radiofrequency microelectromechanical systems; Switches; Telecommunication switching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 2002 IEEE MTT-S International
  • Conference_Location
    Seattle, WA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-7239-5
  • Type

    conf

  • DOI
    10.1109/MWSYM.2002.1012147
  • Filename
    1012147
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1841090