Title :
ISSM 2001 index of presenters
Abstract :
Presents an index of the authors whose papers are published in the conference.
Keywords :
Electrons; Indium tin oxide; Instruments; Lead compounds; Manufacturing automation; Microelectronics; National electric code; Semiconductor device manufacture; Semiconductor materials; Silicon;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA, USA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.963028
