A latching MEMS relay for DC and RF applications

A latching MEMS relay, based on thermal actuator, for both DC and RF applications are described. In contrast to electrostatic MEMS relays that require a voltage to hold a closed state, this relay is a true mechanical latching design where no power is required to hold a state. For DC applications, the relay can typically switch 250 mA of current in cold switching configuration, and up to 10 mA at 10 V in hot switching applications. For RF relay, based on the similar design, typical performance parameters are (at 6 GHz): isolation ∼-40 dB, and > insertion loss <-1.0 dB and return loss <-15 dB.