Title :
Components for an onboard optical communication structure for silicon circuits
Author :
Federighi, Marco ; Kenyon, Tony ; Massarek, Ilana ; Pitt, Chris ; Pradissitto, Jasmine ; Robinson, Henry ; Trwoga, Phil
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. Coll. London, UK
Abstract :
This paper reports progress in developing material systems for three components which may have the potential to provide part of an on-chip optical communication network for silicon integrated circuits. The type of network envisaged comprises a distributed optical waveguide network sited within the multilayer dielectric-metallisation component interconnection scheme on a VLSI wafer
Keywords :
integrated circuit metallisation; Si; VLSI wafer; distributed optical waveguide network; material systems; multilayer dielectric-metallisation component interconnection scheme; on-chip optical communication network; onboard optical communication structure; silicon circuits; silicon integrated circuits;
Conference_Titel :
Planar Silicon Hybrid Optoelectronics (Digest No. 1994/198), IEE Colloquium on
Conference_Location :
London
