Research of a novel xy-table based on error compensation

With the increasing demand of high-speed high-precision positioners in industrial applications, a novel high-speed high-precision xy-table based on error compensation is presented in the paper. According to the theory of yaw error compensation, four inductive sensors were used to measure the yaw error and a micro-table used to compensate the error while the macro-table moving in high speed mode. Based on theoretical calculation and finite element analysis, the micro-table based on piezoelectric actuator (PZT) drive was designed. The cross-coupling controller (CCC) took the whole system as the control target to reduce contour error. Experimental results proved that the contour accuracy of the xy-table was improved by applying the error compensation combined with CCC.