Title :
New transmission line structure with suppressed eddy current effects
Author :
Peter, M. ; Hein, H. ; Oehler, F. ; Baureis, P.
Author_Institution :
Univ. of Appl. Sci. Wiirzburg-Schweinfurt, Wurzburg, Germany
Abstract :
A new transmission line structure is presented which features suppression of eddy currents and skin-effect. This results in lower loss and lower frequency dependence of line parameters. Transmission lines were fabricated in a standard digital CMOS process with 3 metal layers and low resistance substrate. Measurements were performed and the successful reduction of eddy currents in the metal conductors could clearly be identified.
Keywords :
CMOS integrated circuits; eddy currents; high-frequency transmission lines; integrated circuit metallisation; microstrip lines; skin effect; digital CMOS process; eddy current suppression; high frequency circuits; line parameter frequency dependence; loss; low resistance substrate; metal conductors; microstrip line structure; skin-effect suppression; transmission line structure; Conductors; Dielectric losses; Dielectric substrates; Distributed parameter circuits; Eddy currents; Frequency; Magnetic fields; Microstrip; Propagation losses; Transmission lines;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1012259